Mechanical characteristics of ultra-long horizontal nanocantilevers grown by real-time feedback control on focused-ion-beam chemical vapour deposition

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|12|125028-125033

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.12, 2015-12, pp. : 125028-125033

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