Development of a CMOS MEMS pressure sensor with a mechanical force-displacement transduction structure

E-ISSN： 1361-6439|25|12|125024-125035

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.12, 2015-12, pp. : 125024-125035

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