Engineering stress in thin films for the field of bistable MEMS

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|12|125025-125031

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.12, 2015-12, pp. : 125025-125031

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