Design and characterization of a resonant triaxial microprobe

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|12|125011-125019

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.12, 2015-12, pp. : 125011-125019

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Abstract