Piezoelectric thin films formed by MOD on cantilever beams for micro sensors and actuators

Author: Cui T.   Markus D.   Zurn S.   Polla D. L.  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.10, Iss.2, 2004-01, pp. : 137-141

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next