Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

Author： Witvrouw A.   Rusu C.   Jansen H.   Gunn R.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.5, 2004-08, pp. : 364-371

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