Vacuum measurement in wafer level encapsulations by interference microscopy

Author: Bosseboeuf A.   Grandchamp J.   Breluzeau C.   Lani S.   Palomo J.   Bouville D.  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.12, Iss.10-11, 2006-09, pp. : 1063-1069

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