High quality factor copper inductors integrated in deep dry-etched quartz substrates

Author： Leroy C.   Pisani M.   Hibert C.   Bouvet D.   Puech M.   Ionescu A.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.11-12, 2007-07, pp. : 1483-1487

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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