Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

Author: Lu Jian   Ikehara Tsuyoshi   Kobayashi Takeshi   Maeda Ryutaro   Mihara Takashi  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.13, Iss.11-12, 2007-07, pp. : 1517-1522

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