MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive

Author： Mehdaoui A.   Pisani M.   Tsamados D.   Casset F.   Ancey P.   Ionescu A.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.11-12, 2007-07, pp. : 1589-1594

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