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Author: Mekaru Harutaka Kusumi Shinji Sato Noriaki Shimizu Masami Yamashita Michiru Shimada Osamu Hattori Tadashi
Publisher: Springer Publishing Company
ISSN: 0946-7076
Source: Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 393-402
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