Fabrication of a spiral microcoil using a 3D-LIGA process

Author： Mekaru Harutaka Kusumi Shinji Sato Noriaki Shimizu Masami Yamashita Michiru Shimada Osamu Hattori Tadashi

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 393-402

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