Wafer-level plasma activated bonding: new technology for MEMS fabrication

Author: Dragoi Viorel   Mittendorfer Gerald   Thanner Christine   Lindner Paul  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.14, Iss.4-5, 2008-04, pp. : 509-515

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