Low-resistivity indium tantalum oxide films by magnetron sputtering

Author： Ju H.   Hwang S.   Jeong C.-O.   Park S.-H.   Choi J.-G.   Park C.  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.79, Iss.1, 2004-06, pp. : 109-111

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