Fabrication of high-aspect-ratio silicon nanostructures using near-field scanning optical lithography and silicon anisotropic wet-etching process

Author: Kwon S.J.   Jeong Y.M.   Jeong S.H.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.86, Iss.1, 2007-01, pp. : 11-18

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