Influence of filament geometry on film uniformity in a catalytic CVD system for low-temperature processing

Author： Keum Ki-Su   Song Tae-Ho   Hong Wan-Shick  

Publisher： Taylor & Francis Ltd

ISSN： 1598-0316

Source： Journal of Information Display, Vol.15, Iss.1, 2014-01, pp. : 25-30

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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