A low energy FIB processing, repair, and test system

Author: Miura K.   Kobatake T.   Nakamae K.   Fujioka H.  

Publisher: Elsevier

ISSN: 0026-2714

Source: Microelectronics Reliability, Vol.43, Iss.9, 2003-09, pp. : 1627-1631

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Abstract