Migration of noble gas atoms in interaction with vacancies in silicon

Author: PizzagalliL   Charaf-EddinA  

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|8|85022-85029

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.8, 2015-08, pp. : 85022-85029

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Abstract