Fabrication of homogenous multilayered W films by multi-step sputtering deposition: a novel grain boundary enrichment strategy

Author: Zhu Hailin   Yang Jijun   Wan Qiang   Lin Liwei   Liao Jiali   Yang Yuanyou   Liu Ning  

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|44|445603-445609

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.44, 2015-11, pp. : 445603-445609

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