An Analysis of Low-Pressure High-Frequency Plasma Chemical Vapor Deposition System for Flexible Solar Cell Characteristics

Publisher： Trans Tech Publications

E-ISSN： 1662-7482|2015|749|121-125

ISSN： 1660-9336

Source： Applied Mechanics and Materials, Vol.2015, Iss.749, 2015-05, pp. : 121-125

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