Q-Factor Improving of Film Bulk Acoustic Wave Resonator for Chip-Scale Atomic Clocks

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2015|645|509-512

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2015, Iss.645, 2015-06, pp. : 509-512

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract