Improvement of the Specific Contact Resistance on P-Type 4H-SiC by Using a Highly P-Typed Doped 4H-SiC Layer Selectively Grown by VLS Transport

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2014|806|57-60

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2014, Iss.806, 2015-01, pp. : 57-60

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Abstract