Structural and Electrical Characterization of the Initial Stage of Physical Vapor Transport Growth of 4H-SiC Crystals

Publisher： Trans Tech Publications

E-ISSN： 1662-9752|2015|821|90-95

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2015, Iss.821, 2015-07, pp. : 90-95

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