Influence of Temperatures on the Formation of SiBCN Powders Prepared by CVD Using Borazine and Liquid Polycarbosilane

E-ISSN： 1662-9752|2015|816|182-185

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2015, Iss.816, 2015-05, pp. : 182-185

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Boron doping effects and microcrystallite formation in SiC:H films prepared using ECR-CVD

By Yoon S.F.

Vacuum, Vol. 48, Iss. 6, 1997-06 ,pp. : 503-507

Elsevier

Access to resources Recommend Favorite

The Microstructure and Dielectric Properties of SiBCN Ceramics Fabricated Via LPCVD/CVI

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, Vol. 2-7820, Iss. 9, 2015-09 ,pp. : 2703-2706

John Wiley & Sons Inc

Access to resources Recommend Favorite

The Microstructure and Dielectric Properties of SiBCN Ceramics Fabricated Via LPCVD/CVI

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, Vol. 98, Iss. 9, 2015-09 ,pp. : 2703-2706

John Wiley & Sons Inc

Access to resources Recommend Favorite

The influence of filament temperature on crystallographic properties of poly-Si films prepared by the hot-wire CVD method

By Lee J.C. Kang K.H. Kim S.K. Yoon K.H. Song J. Park I.J.

Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. : 188-193

Elsevier

Access to resources Recommend Favorite

Comparison of Consolidation Routes for Mo–Si–B Materials Prepared by Using Nitride Containing Powders

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, Vol. 98, Iss. 11, 2015-11 ,pp. : 3569-3575

John Wiley & Sons Inc

Access to resources Recommend Favorite