Author: Deguchi Shinji Hotta Junya Yokoyama Sho Matsui Tsubasa S
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|9|97002-97007
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.9, 2015-09, pp. : 97002-97007
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract