Author： Meyer M T Subramanian S Kim Y W Ben-Yoav H Gnerlich M Gerasopoulos K Bentley W E Ghodssi R
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|9|95003-95012
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.9, 2015-09, pp. : 95003-95012
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