Author: Kusaka Yasuyuki Koutake Masayoshi Ushijima Hirobumi
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|9|95002-95010
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.9, 2015-09, pp. : 95002-95010
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