Fabrication of Through Micro-hole Arrays in Silicon Using Femtosecond Laser Irradiation and Selective Chemical Etching

Author： Bo Gao   Tao Chen   Ying Chen   Jin-Hai Si   Xun Hou  

Publisher： IOP Publishing

E-ISSN： 1741-3540|32|10|107901-107904

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.32, Iss.10, 2015-10, pp. : 107901-107904

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