Study of Oxygen Concentration in TMAH Solution for Improvement of Sigma-Shaped Wet Etching Process

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2016|255|18-21

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2016, Iss.255, 2016-10, pp. : 18-21

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract