Design of electrostatic actuators for suppressing vertical disturbances of CMOS-MEMS capacitive force sensors in bio applications

Author： Mozhdehi Reza Jalil   Ghafari Ali Selk   Khayyat Amir A.A.  

Publisher： Edp Sciences

E-ISSN： 2257-7750|16|3|306-306

ISSN： 2257-7777

Source： Mechanics & Industry, Vol.16, Iss.3, 2015-04, pp. : 306-306

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