Author: Horade M Kojima M Kamiyama K Kurata T Mae Y Arai T
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|11|115002-115010
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115002-115010
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract