Development of flexible ZnO thin film surface acoustic wave strain sensors on ultrathin glass substrates

Author： Chen Jinkai Guo Hongwei He Xingli Wang Wenbo Xuan Weipeng Jin Hao Dong Shurong Wang Xiaozhi Xu Yang Lin Shisheng Garner Sean Luo Jikui

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|11|115005-115011

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115005-115011

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