Control of crystalline volume and nano crystal grain size in nanocrystalline silicon thin film deposited by PECVD

Author: Bui Thanh Tung   Dang Mau Chien  

Publisher: Edp Sciences

E-ISSN: 1286-0050|68|2|20303-20303

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.68, Iss.2, 2014-11, pp. : 20303-20303

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content