Correlations of plasma parameters and properties of magnetron sputtered TiN films

Author： Kumari N.   Das P.S.   Joshi N.K.   Barhai P.K.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|59|2|20302-20302

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.59, Iss.2, 2012-09, pp. : 20302-20302

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