X-ray reflectivity and non-specular scattering investigation of amorphous W/Si multilayers after rapid thermal annealing

Publisher： Edp Sciences

E-ISSN： 1764-7177|03|C8|C8-337-C8-340

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.03, Iss.C8, 1993-12, pp. : C8-337-C8-340

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