An AES study of damage induced by inert gas ions at SiO2 surfaces : influence of ion mass and energy

Publisher: Edp Sciences

E-ISSN: 0035-1687|25|4|389-394

ISSN: 0035-1687

Source: Revue de Physique Appliquée (Paris), Vol.25, Iss.4, 1990-04, pp. : 389-394

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