NONEQUILIBRIUM SOLUBILITY AND SEGREGATION IN ION IMPLANTED, LASER ANNEALED SILICON

Publisher： Edp Sciences

E-ISSN： 0449-1947|41|C4|C4-91-C4-96

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.41, Iss.C4, 1980-05, pp. : C4-91-C4-96

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