PLANAR MAGNETRON SPUTTERING OF TITANIUM NITRIDE ON HIGH SPEED STEEL

Publisher： Edp Sciences

E-ISSN： 0449-1947|47|C7|C7-251-C7-255

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.47, Iss.C7, 1986-11, pp. : C7-251-C7-255

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