Optimal Design and Control of a z-Tilt Piezoelectric Based Nano-Scale Compensation Stage with Circular Flexure Hinges

Author： Lee Hau-Wei  

Publisher： MDPI

E-ISSN： 2411-5134|1|3|15-15

ISSN： 2411-5134

Source： Inventions, Vol.1, Iss.3, 2016-08, pp. : 15-15

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