A WSi–WSiN–Pt Metallization Scheme for Silicon Carbide-Based High Temperature Microsystems

Author: Ngo Ha-Duong   Mukhopadhyay Biswajit   Mackowiak Piotr   Kröhnert Kevin   Ehrmann Oswin   Lang Klaus-Dieter  

Publisher: MDPI

E-ISSN: 2072-666x|7|10|193-193

ISSN: 2072-666x

Source: Micromachines, Vol.7, Iss.10, 2016-10, pp. : 193-193

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Abstract