Residual stresses in AlCrN PVD thin films

Author: Pham T.H.T.  

Publisher: Edp Sciences

E-ISSN: 2100-014x|6|issue|26002-26002

ISSN: 2100-014x

Source: EPJ Web of Conference, Vol.6, Iss.issue, 2010-06, pp. : 26002-26002

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