A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors

Author： Zhang Chi   Zhang Gaofei   You Zheng  

Publisher： MDPI

E-ISSN： 1424-8220|9|1|631-644

ISSN： 1424-8220

Source： Sensors, Vol.9, Iss.1, 2009-01, pp. : 631-644

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