Novel Designs for Application Specific MEMS Pressure Sensors

Author： Fragiacomo Giulio   Reck Kasper   Lorenzen Lasse   Thomsen Erik V.  

Publisher： MDPI

E-ISSN： 1424-8220|10|11|9541-9563

ISSN： 1424-8220

Source： Sensors, Vol.10, Iss.11, 2010-10, pp. : 9541-9563

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