A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass

Author: Khir Mohd Haris Md   Qu Peng   Qu Hongwei  

Publisher: MDPI

E-ISSN: 1424-8220|11|8|7892-7907

ISSN: 1424-8220

Source: Sensors, Vol.11, Iss.8, 2011-08, pp. : 7892-7907

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Abstract