Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module

Author： Ni Zao Yang Chen Xu Dehui Zhou Hong Zhou Wei Li Tie Xiong Bin Li Xinxin

Publisher： MDPI

E-ISSN： 1424-8220|13|1|1085-1101

ISSN： 1424-8220

Source： Sensors, Vol.13, Iss.1, 2013-01, pp. : 1085-1101

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