A Bi-Directional Out-of-Plane Actuator by Electrostatic Force

Author： Ren Hao   Wang Weimin   Tao Fenggang   Yao Jun  

Publisher： MDPI

E-ISSN： 2072-666x|4|4|431-443

ISSN： 2072-666x

Source： Micromachines, Vol.4, Iss.4, 2013-12, pp. : 431-443

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