SU-8 as a Material for Microfabricated Particle Physics Detectors

Author： Maoddi Pietro   Mapelli Alessandro   Jiguet Sebastien   Renaud Philippe  

Publisher： MDPI

E-ISSN： 2072-666x|5|3|594-606

ISSN： 2072-666x

Source： Micromachines, Vol.5, Iss.3, 2014-08, pp. : 594-606

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