Electrical Characteristics of the Uniaxial-Strained nMOSFET with a Fluorinated HfO₂/SiON Gate Stack

Publisher： MDPI

E-ISSN： 1996-1944|7|3|2370-2381

ISSN： 1996-1944

Source： Materials, Vol.7, Iss.3, 2014-03, pp. : 2370-2381

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