Innovative SU-8 Lithography Techniques and Their Applications

By Lee Jeong Bong   Choi Kyung-Hak   Yoo Koangki  

Micromachines, Vol. 6, Iss. 1, 2014-12 ,pp. : 1-18

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SU-8 Photolithography as a Toolbox for Carbon MEMS

By Martinez-Duarte Rodrigo  

Micromachines, Vol. 5, Iss. 3, 2014-09 ,pp. : 766-782

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SU-8 as a Material for Microfabricated Particle Physics Detectors

By Maoddi Pietro   Mapelli Alessandro   Jiguet Sebastien   Renaud Philippe  

Micromachines, Vol. 5, Iss. 3, 2014-08 ,pp. : 594-606

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SU-8 Composite Based “Lube-tape” for a Wide Range of Tribological Applications

By Saravanan Prabakaran   Satyanarayana Nalam   Sinha Sujeet K.  

Micromachines, Vol. 5, Iss. 2, 2014-05 ,pp. : 263-274

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SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use

By Winterstein Thomas   Staab Matthias   Nakic Christian   Feige Hans-Jürgen   Vogel Jürgen   Schlaak Helmut F.  

Micromachines, Vol. 5, Iss. 4, 2014-12 ,pp. : 1310-1322

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