Design and Fabrication of Interdigital Nanocapacitors Coated with HfO₂

Author： González Gabriel Kolosovas-Machuca Eleazar Samuel López-Luna Edgar Hernández-Arriaga Heber González Francisco Javier

Publisher： MDPI

E-ISSN： 1424-8220|15|1|1998-2005

ISSN： 1424-8220

Source： Sensors, Vol.15, Iss.1, 2015-01, pp. : 1998-2005

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