Resonant Varifocal Micromirror with Piezoresistive Focus Sensor

Author: Nakazawa Kenta   Sasaki Takashi   Furuta Hiromasa   Kamiya Jiro   Sasaki Hideki   Kamiya Toshikazu   Hane Kazuhiro  

Publisher: MDPI

E-ISSN: 2072-666x|7|4|57-57

ISSN: 2072-666x

Source: Micromachines, Vol.7, Iss.4, 2016-03, pp. : 57-57

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Abstract